Browsing by Subject "Magnetron sputtering"
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Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system
(Taylor and Francis Inc., 2016)In this work, Paschen curve for argon gas was obtained during copper deposition using a DC magnetron sputtering system. Five process parameters of Paschen curve were used to obtain the electron density and deposition rate ... -
Thickness-dependent magnetic and transport properties of La0.5Sr0.5MnO3 thin films deposited by DC magnetron sputtering on the LaAlO3 substrate
(Springer Verlag, 2018)Thickness-dependent structural, magnetic and transport properties of La0.5Sr0.5MnO3 (LSMO) thin films have been studied. A series of the LSMO films with thickness 30, 60, 125 and 300?nm have been deposited on the LaAlO3 ...