Department Of Physics

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Author: search.filters.author.Kumar, NarenderHas files: No

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    Design and simulation of 2450 MHz microwave cavity for resonance and off-resonance plasma diagnosis in-situ plasma irradiation facility
    (Institute of Physics, 2023-02-09T00:00:00) Swaroop, Ram; Kumar, Narender; Sabavath, Gopikishan; Choudhary, Virendra�Singh; Jewariya, Yogesh; Rodrigues, G.
    The microwave plasma diagnosis in-situ irradiation system has been developed at the Central University of Punjab, Bathinda. The final design is achieved by a combination of analytical and simulation methods using CST and Comsol Multiphysics software. Simulations outcome reveals the electric field profile at the center of the microwave plasma chamber is strong and dense. A strong electric field profile inside the microwave cavity has been verified by the confinement of the plasma in the absence of an external magnetic field. The magnetic field profile for the 2450 MHz microwave facility is simulated and confirmed experimentally. Different RF powers and working gas pressures have been used with Langmuir probes to record the plasma signal. As a second stage, we studied the practicality of using a plasma cavity to treat materials with plasma for materials science experiment in plasma environment. This work shows the results of a thorough computational analysis of a microwave plasma source that has been tested in lab. � 2023 IOP Publishing Ltd and Sissa Medialab.
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    Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source
    (American Institute of Physics Inc., 2021-05-25T00:00:00) Swaroop, Ram; Kumar, Narender; Rodrigues, G.; Kanjilal, D.; Banerjee, I.; Mahapatra, S.K.
    A project on developing a 2.45 GHz microwave ion source based compact ion implanter and plasma diagnostic facility has been taken up by the Central University of Punjab, Bathinda. It consists of a double-wall ECR plasma cavity, a four-step ridge waveguide, an extraction system, and an experimental beam chamber. The mechanical design has been carried out in such a way that both types of experiments, plasma diagnosis and ion implantation, can be easily accommodated simultaneously and separately. To optimize microwave coupling to the ECR plasma cavity, a four-step ridge waveguide is designed. Microwave coupling simulation for the ECR plasma cavity has been performed at different power inputs using COMSOL Multiphysics. An enhanced electric field profile has been obtained at the center of the ECR plasma cavity with the help of a four-step ridge waveguide compared to the WR284 waveguide. The magnetic field distribution for two magnetic rings and the extraction system's focusing properties have been simulated using the computer simulation technique. A tunable axial magnetic field profile has been obtained with a two permanent magnetic ring arrangement. The dependency of the beam emittance and beam current on accelerating voltages up to 50 kV has been simulated with different ions. It shows that ion masses have a great impact on the beam emittance and output current. This facility has provision for in situ plasma diagnosis using a Langmuir probe and optical emission spectroscopy setups. This system will be used for ion implantation, surface patterning, and studies of basic plasma sciences. � 2021 Author(s).