Browsing by Author "Das, A.K."
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Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system
Gopikishan, S.; Banerjee, I.; Bogle, K.A.; Das, A.K.; Pathak, A.P.; Mahapatra, S.K. (Taylor and Francis Inc., 2016)In this work, Paschen curve for argon gas was obtained during copper deposition using a DC magnetron sputtering system. Five process parameters of Paschen curve were used to obtain the electron density and deposition rate ...