Browsing by Author "Gopikishan, S."

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    Axial distribution of plasma fluctuations, plasma parameters, deposition rate and grain size during copper deposition
    (Taylor and Francis Inc., 2017) Gopikishan, S.; Banerjee, I.; Pathak, Anand; Mahapatra, S. K.
    Floating potential fluctuations, plasma parameters and deposition rate have been investigated as a function of axial distance during deposition of copper in direct current (DC) magnetron sputtering system. Fluctuations were analyzed using phase space, power spectra and amplitude bifurcation plots. It has been observed that the fluctuations are modified from chaotic to ordered state with increase in the axial distance from cathode. Plasma parameters such as electron density (ne), electron temperature (Te) and deposition rate (Dr) were measured and correlated with plasma fluctuations. It was found that more the deposition rate, greater the grain size, higher the electron density, higher the electron temperature and more chaotic the oscillations near the cathode. This observation could be helpful to the thin film technology industry to optimize the required film. ? 2017 Informa UK Limited, trading as Taylor & Francis Group.
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    Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system
    (Taylor and Francis Inc., 2016) Gopikishan, S.; Banerjee, I.; Bogle, K.A.; Das, A.K.; Pathak, A.P.; Mahapatra, S.K.
    In this work, Paschen curve for argon gas was obtained during copper deposition using a DC magnetron sputtering system. Five process parameters of Paschen curve were used to obtain the electron density and deposition rate of the deposited nanostructured thin films. Plasma parameter such as electron density was correlated with the deposition rate. It is observed that a minimum deposition rate was obtained for the plasma process parameter corresponding to the Paschen minimum. This investigation helps to understand and optimize the quality of nanostructured thin films depending on the process parameters. ? 2016 Informa UK Limited, trading as Taylor & Francis Group.