Department Of Physics

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Subject: search.filters.subject.Deposition

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    Paschen curve approach to investigate electron density and deposition rate of Cu in magnetron sputtering system
    (Taylor and Francis Inc., 2016) Gopikishan, S.; Banerjee, I.; Bogle, K.A.; Das, A.K.; Pathak, A.P.; Mahapatra, S.K.
    In this work, Paschen curve for argon gas was obtained during copper deposition using a DC magnetron sputtering system. Five process parameters of Paschen curve were used to obtain the electron density and deposition rate of the deposited nanostructured thin films. Plasma parameter such as electron density was correlated with the deposition rate. It is observed that a minimum deposition rate was obtained for the plasma process parameter corresponding to the Paschen minimum. This investigation helps to understand and optimize the quality of nanostructured thin films depending on the process parameters. ? 2016 Informa UK Limited, trading as Taylor & Francis Group.
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    Facile chemical bath deposition method for interconnected nanofibrous polythiophene thin films and their use for highly efficient room temperature NO2 sensor application
    (Elsevier B.V., 2017) Kamble, D.B.; Sharma, A.K.; Yadav, J.B.; Patil, V.B.; Devan, R.S.; Jatratkar, A.A.; Yewale, M.A.; Ganbavle, V.V.; Pawar, S.D.
    Interconnected nanofibrous polythiophene (INPTh) film was deposited on the glass substrate through a simple chemical bath deposition method. The influence of monomer concentration on INPTh film properties as well as on NO2sensing properties of the film was studied. The morphological and structural studies were carried out using FTIR spectroscopy, FE-SEM microscope, and AFM analysis. The FTIR spectra confirmed the formation of PTH structure. The interconnected nanofibrous surface morphology was observed in FE-SEM images. The roughness of the film and thickness (225?nm?442?nm) was found to increase with monomer concentration up to 0.5?M, after that, both decreased at 0.6?M monomer concentration. The highest selectivity of PTh thin film towards NO2was observed than the other gases like H2S, SO2, NH3, CO and LPG. The influence of film morphology and thickness on gas sensing properties was observed, which was varied with monomer concentration. The film deposited at 0.5?M monomer concentration showed the highest NO2gas response of 47.58% at room temperature. Present results revealed that monomer concentration was also one of the deposition parameters for tuning the morphological as well as gas sensing properties of the chemical bath deposited PTh film. ? 2017 Elsevier B.V.
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    Axial distribution of plasma fluctuations, plasma parameters, deposition rate and grain size during copper deposition
    (Taylor and Francis Inc., 2017) Gopikishan, S.; Banerjee, I.; Pathak, Anand; Mahapatra, S. K.
    Floating potential fluctuations, plasma parameters and deposition rate have been investigated as a function of axial distance during deposition of copper in direct current (DC) magnetron sputtering system. Fluctuations were analyzed using phase space, power spectra and amplitude bifurcation plots. It has been observed that the fluctuations are modified from chaotic to ordered state with increase in the axial distance from cathode. Plasma parameters such as electron density (ne), electron temperature (Te) and deposition rate (Dr) were measured and correlated with plasma fluctuations. It was found that more the deposition rate, greater the grain size, higher the electron density, higher the electron temperature and more chaotic the oscillations near the cathode. This observation could be helpful to the thin film technology industry to optimize the required film. ? 2017 Informa UK Limited, trading as Taylor & Francis Group.